Combining X-ray reflectometry and microscopy

Argonne National Laboratory researchers in collaboration with Xradia, Inc. have developed a novel X-ray surface topography technique by combining X-ray reflection, which is sensitive to height or depth on a sub nanometer scale, and full-field X-ray microscopy with condenser and objective Fresnel zone plates. Recent rapid progress in X-ray microscopy now allows scientists to obtain X-ray images with ca. 10 nm spatial resolution. However, so far, almost all full-filed imaging has employed transmission geometry. The present research has extended the technique to reflection geometry. It has become possible to image the distribution of molecular-scale interfacial features directly and non-invasively with full-field imaging. Interfacial phase contrast from elementary defect structures allows direct observation of 0.6-nm-high monomolecular steps at a solid surface. For more information, see the paper, "Observation of subnanometre-high surface topography with X-ray reflection phase-contrast microscopy", P. Fenter et al., Nature Physics, 2, 700-704 (2006).