The 2009 workshop on 'buried' interface science with X-rays and neutrons was held at Akihabara campus, Tsukuba University, Japan, on July 13-14, 2009. The workshop was the latest in a series held since 2001; Tsukuba (December 2001), Niigata (September 2002), Nagoya (July 2003), Tsukuba (July 2004), Saitama (March 2005), Yokohama (July 2006), Kusatsu (August 2006), Tokyo (December 2006), Sendai (July 2007), Sapporo (September 2007), Tokyo (December 2007) and Tsukuba (March 2009). There are increasing demands for sophisticated metrology in order to observe multilayered materials with nano-structures (dots, wires, etc), which are finding applications in electronic, magnetic, optical and other devices. X-ray and neutron analysis is known for its ability to observe in a non-destructive manner even 'buried' function interfaces as well as the surface. In addition to such inherent advantages, recent remarkable advances in micro analysis and quick time-resolved analysis in X-ray reflectometry are extremely important. The present workshop gathered together those with different research backgrounds, i.e., from semiconductor electronics to chemical bio materials, and even theoretical groups were invited to give insights into unsolved problems on buried interfaces. The workshop proceedings will be published in Transactions of the Materials Research Society of Japan, no later than the end of 2009.
