Quantitative synchrotron X-ray fluorescence analysis of buried nanolayer

A German group led by Dr. B. Beckhoff (Physikalisch-Technische Bundesanstalt (PTB), Berlin) recently analyzed quantitatively the buried B₄C nanolayer on a silicon substrate by using synchrotron radiation at BESSY II. The thickness and elemental composition were successfully determined by reference-free X-ray fluorescence spectrometry under conventional and grazing-incidence conditions. For more information, see the paper, "Complementary Characterization of Buried Nanolayers by Quantitative X-ray Fluorescence Spectrometry under Conventional and Grazing Incidence Conditions", R. Unterumsberger et al., Anal. Chem., 83, 8623 (2011).