Quantitative grazing-incidence small angle X-ray scattering analysis

Dr. D. Babonneau (PhyMat, CNRS UMR 6630, Université de Poitiers, France) and his colleagues have recently analyzed morphological characteristics of nanoripple patterns prepared by broad beam-ion sputtering of Al₂O₃ and Si₃N₄ amorphous thin films as well as 2D arrays of Ag nanoparticles obtained by glancing angle deposition on Al₂O₃ nanorippled buffer layers. They employed 3D reciprocal space mapping in the grazing incidence small-angle X-ray scattering geometry. For more information, see the paper, "Quantitative analysis of nanoripple and nanoparticle patterns by grazing incidence small-angle x-ray scattering 3D mapping", D. Babonneau et al., Phys. Rev. B85, 235415 (2012).