Grazing-incidence X-ray analysis to see buried structures

Dr. B. Beckhoff (Physikalisch-Technische Bundesanstalt, Germany) and his colleagues have recently published some successful applications of grazing-incidence X-ray fluorescence and near-edge X-ray absorption fine structure to nano-scale thin layers of chemically vapor deposited B_xC_yN_z on metallic Ni. For more information, see the paper, "Nondestructive and Nonpreparative Chemical Nanometrology of Internal Material Interfaces at Tunable High Information Depths", B. Pollakowski et al., Anal. Chem., 85, 193 (2013).